PVD system (Magnetron, Thermal and E-BEAM)
Contacts: Moshe Feldberg, moshe.feldberg@biu.ac.il
Model: Bestec, custom made
Manufacture: Bestec
Description:
PVD system for Thin layer deposition with 2 chambers (Thermal and Sputtering) and 1 load lock (LL). The thermal chamber contains E-BEAM and thermal, the Sputtering contains 4 DC/AC magnetrons sources and ion milling source. While the Load-Lock is located between these 2 chambers to ensure inerratic enviromment during transfer.
![PVD](/sites/nano/files/styles/large/public/images/instrument/PVD.jpg?itok=M3KoDhJ7)
תאריך עדכון אחרון : 15/02/2024