PVD system (Magnetron, Thermal and E-BEAM)

Contacts: Moshe Feldberg, moshe.feldberg@biu.ac.il

Model:  Bestec, custom made

Manufacture:  Bestec

Description:

PVD system for Thin layer deposition with 2 chambers (Thermal and Sputtering) and 1 load lock (LL). The thermal chamber contains E-BEAM and thermal, the Sputtering contains 4 DC/AC magnetrons sources and ion milling source. While the Load-Lock is located between these 2 chambers to ensure inerratic enviromment during transfer.

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