Mask Aligner

Contacts: Mark Oksman, mark.oksman@biu.ac.il

Model:  MA/BA6

Manufacture:  SUSS

Description: 

The Karl Suss MA-6 Contact Aligner system designed for all standard lithography applications. The MA-6 can perform precision mask-to-wafer front- or back-side alignment in hard- and soft- contact, as well as high and low vacuum contact. Our current configuration accommodates 3", 4" and 6" wafers and pieces.

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