Mask Aligner
Contacts: Mark Oksman, mark.oksman@biu.ac.il
Model: MA/BA6
Manufacture: SUSS
Description:
The Karl Suss MA-6 Contact Aligner system designed for all standard lithography applications. The MA-6 can perform precision mask-to-wafer front- or back-side alignment in hard- and soft- contact, as well as high and low vacuum contact. Our current configuration accommodates 3", 4" and 6" wafers and pieces.
![Mask Aligner](/sites/nano/files/styles/large/public/images/instrument/mask_aligner%20copy.jpg?itok=gCZoTxKN)
תאריך עדכון אחרון : 15/02/2024