Maskless Lithography, MLA

Contacts: Mark Oksman,


Model:  MLA 150

Manufacture:  Hiedelberg


The MLA150 is a high speed direct write lithography tool extended by capabilities formerly only available on Mask Aligners. It can expose the patterns directly without prior fabrication of a mask resulting in a significantly shorter prototyping cycle. It offers topside alignment only, and a light source which generates sufficient dose to expose even thick and less sensitive resists.


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תאריך עדכון אחרון : 15/02/2024