Maskless Lithography, MLA

Contacts: Mark Oksman, mark.oksman@biu.ac.il

Model:  MLA 150

Manufacture:  Hiedelberg

Description: 

The MLA150 is a high speed direct write lithography tool extended by capabilities formerly only available on Mask Aligners. It can expose the patterns directly without prior fabrication of a mask resulting in a significantly shorter prototyping cycle. It offers topside alignment only, and a light source which generates sufficient dose to expose even thick and less sensitive resists.

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