E-BEAM Evaporation system

Contacts: Sergey Kanorsky, yossef.kantovrovitch@biu.ac.il

Model:  VST, custom made

Manufacture:  VST

Description:

PVD system for thin layer deposition using E-BEAM and Thermal with ion assist.

The system is suitable for up to 12" wafers !!! with double crystal QTM for high-accuracy deposition.

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