E-BEAM Evaporation system
Contacts: Sergey Kanorsky, yossef.kantovrovitch@biu.ac.il
Model: VST, custom made
Manufacture: VST
Description:
PVD system for thin layer deposition using E-BEAM and Thermal with ion assist.
The system is suitable for up to 12" wafers !!! with double crystal QTM for high-accuracy deposition.
![VST Fortuna e-Beam evaporation system](/sites/nano/files/styles/large/public/images/instrument/VST.png?itok=mHO8CxvM)
תאריך עדכון אחרון : 15/02/2024