E-BEAM Evaporation system

Contacts: Dr. Joseph Kantorovitsch, joseph.kantorovitsch@gmail.com

Model:  VST,  FORTUNA custom made

Manufacture:  VST

Description:

PVD system for Ion Assisted E-BEAM deposition.

The system is suitable for up to 12" wafers !!! with double crystal QTM for high-accuracy deposition.

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