HR-SEM (Sigma)

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High-res & VP imaging of sensitive samples & EDS analysis

High-resolution imaging in variable pressure (VP) mode. Enables imaging of non-conductive, magnetic and beam-sensitive materials with low kV.

BINA's Characterization Unit welcomes both industry professionals and researchers – providing state-of-the-art equipment, expert support, and customized solutions. We’re here for you!

Contacts: Dr. Yuila Vestfrid, yulia.vestfrid@biu.ac.il

SIGMA

Model: HR-SEM SIGMA 360 VP

Manufacture: Zeiss

Resolution: 0.9 nm (15kV)

                       2 nm (500 V)

Specifications:

  • Field Emission Gun

  • High resolution imaging with low currents and low KV without sample bias.

  • No restrictions for imaging of magnetic samples.

  • Specimen chamber: 365 mm inner diameter and 275 mm height for large specimens.

  • 10 chamber ports, including coplanar EDS and EBSD ports for simultaneous analyses, as well as WDS port.

  • 5-axes motorized Cartesian specimen stage with simulated eucentric movement. X, Y = 125 mm, Z: 50mm, T= -10° to + 90°, R = 360° continuous

  • Airlock 80mm - accepts samples up to 80 mm in diameter.

  • Large Frame store – up to 32k x 24k imaging resolution without stitching.

  • Drift Corrected Frame Averaging and Integration.

  • Navigation Camera – Airlock mounted for easy sample navigation via sample photo.

  • Transfer shuttle – allows to transfer samples in vacuum or in an inert atmosphere. Version for large samples of 10mm height with metal lid.

  • Following detectors are included:

  1. High efficiency annular true on-axis In-lens SE1 detector.

  2. SE2 – Next Generation high sensitivity Everhart-Thornley SE detector in the chamber.

  3. High Definition low KV BSD Detector.

  4. aSTEM – In-situ adjustable annular STEM detector.

  5. VPSE – SE Detector for the Variable Pressure mode.

  6. 60mm EDS, Bruker.