Facility- Clean Room

Contacts: Mr. Moshe Feldberg, moshe.feldberg@biu.ac.il

Description:

A 152-meter square cleanroom of class 100 and class 1000 equipped with a full suite of tools supporting device fabrication and characterization.

Specifications:

• Clean Rooms

  • Class 100 Yellow room for photolithography

  • Class 1000 White rooms for etch and deposition

  • Class 10,000 White room

• Working stations

        Clean room workstations for sample cleaning, spin coating, photo / electron beam                                          resist development and wet etch include spinners, oven & hot Plates

• Cleaning and Activation

  • Ultra sonic tanks (freq + puls)

  • Plasma asher for cleaning and activation with 3 gases (O₂, Ar, N₂)

  • UV cleaner + ozone generator