Facility- Clean Room

Contacts: Mr. Moshe Feldberg, moshe.feldberg@biu.ac.il

Description:

A 152-meter square cleanroom of class 100 and class 1000 equipped with a full suite of tools supporting device fabrication and characterization.

clean-room_001.jpg

Specifications:

  • Clean Rooms
    • Class 100 Yellow room for photolithography
    • Class 1000 White rooms for etch and deposition
    • Class 10,000 White room
  • Working stations

        Clean room workstations for sample cleaning, spin coating, photo / electron beam                                          resist development and wet etch include spinners, oven & hot Plates

  • Cleaning and Activation
    • Ultra sonic tanks (freq + puls)
    • Plasma asher for cleaning and activation with 3 gases (O2, Ar, N2)
    • UV cleaner + ozone generator