1.7 MV Tandem Pelletron accelerator, model 5SDH (NEC, USA)

Rutherford Backscattering Spectroscopy (RBS)

• The nondestructive and multielemental analysis technique 
• Elemental composition (stoichiometry) without a standard (1 - 5% accuracy).
• Elemental depth profiles with a depth resolution of 2 - 10 nanometers and a maximum depth of 2 - 20 microns. 
• Surface impurities and impurity distribution in depth (sensitivity up to the sub-ppm range).
• Elemental areal density and thus thickness (or density) of thin films if the film density (or thickness) is known.
• Diffusion depth profiles between interfaces up to a few microns below the surface.
• Channeling-RBS is used to determine the lattice location of impurities and defect distribution depth profile in single crystalline samples.