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1.7 MV Tandem Pelletron accelerator, model 5SDH (NEC, USA)

Rutherford Backscattering Spectroscopy (RBS)

  • The nondestructive and multielemental analysis technique 
  • Elemental composition (stoichiometry) without a standard (1 - 5% accuracy).
  • Elemental depth profiles with a depth resolution of 2 - 10 nanometers and a maximum depth of 2 - 20 microns. 
  • Surface impurities and impurity distribution in depth (sensitivity up to the sub-ppm range).
  • Elemental areal density and thus thickness (or density) of thin films if the film density (or thickness) is known.
  • Diffusion depth profiles between interfaces up to a few microns below the surface.
  • Channeling-RBS is used to determine the lattice location of impurities and defect distribution depth profile in single crystalline samples.

 

    Specifications
    • Nondestructive and multielemental analysis technique
    • Elemental composition (stoichiometry) without a standard (1 - 5% accuracy).
    • Elemental depth profiles with a depth resolution of 2 - 10 nanometers and a maximum depth of 2 - 20 microns.
    • Surface impurities and impurity distribution in depth (sensitivity up to sub-ppm range).
    • Elemental areal density and thus thickness (or density) of thin films if the film density (or thickness) is known.
    • Diffusion depth profiles between interfaces up to a few microns below the surface.
    • Channeling - RBS is used to determine lattice location of impurities and defect distribution depth profile in single crystalline samples

     

    RBS

     

    1.7 MV Tandem Pelletron accelerator, model 5SDH (NEC, USA)

    Last Updated Date : 26/12/2021