3D Optical Profiler (Laser Scanning Confocal Microscope)

3D profiling for MEMS

Confocal laser scanning microscope for high-resolution 3D imaging and surface metrology. Enables analysis of roughness, step height, volume, and film thickness.

BINA's Fabrication Unit welcomes both industry professionals and researchers – providing state-of-the-art equipment, expert support, and customized solutions. We’re here for you!
 

Contacts: Mr. Mark Oksman, mark.oksman@biu.ac.il

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Model:  Olympus LEXT OLS4100

Manufacture:  Olympus

Description:

Confocal laser scanning microscope allows observations of three-dimensional shapes, such as high-density semiconductors and micro-fabricated MEMS. The LEXT microscope uses a laser scanning head for both direct imaging of the surface and for surface profile measurements and makes possible to get high resolution 3D images as well as surface metrology.

Types of the measurements:

  • Roughness
  • Geometric measurements
  • Area/volume
  • Step
  • Profile
  • Size of the particles
  • Film thickness

Specifications:

  • Magnification 108X-17280X
  • X-Y Resolution: 0.12µm
  • Z Resolution: 10 nm
  • XY stage movement: 100 × 100 mm

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