Nuclear reaction analysis
- Nondestructively measures light elemental depth profiles (Z<9) with a superb sensitivity of a few ppm, a good depth resolution of a few nanometers, and a maximum depth of a few microns. Elements like H, D, Li, B, C, O, and F can be analyzed.
- Unlike ion scattering techniques, NRA is an isotopically sensitive technique with an excellent mass resolution and has no mass-depth ambiguity of RBS in data interpretation.
- Channeling-NRA can be used to determine lattice location of impurities and defect distribution depth profile in single crystalline samples.