Elastic Recoil Detection Analysis (ERDA)

  • Nondestructively and simultaneously determines hydrogen isotopes (H and D) and their depth profiles in polymers and other solids with a sensitivity of 0.01 at. %, a depth resolution of 5-20 nm, and a maximum depth of 1 micron
  • Measurements of other light elements (Z<9) are also possible if heavy ions like Cl or Au are used


Movable ion detector (90° - 150°) with various thickness filters for ERDA of light target ions such as H and D