Nanofabrication and Advanced Device Fabrication Services - BINA Institute

BINA’s Fabrication Unit is a state-of-the-art cleanroom facility dedicated to sub-micron and nanoscale device fabrication. The unit provides advanced fabrication services for both academic and industrial users, supporting research, development, and prototyping with expert guidance and cutting-edge infrastructure.

Equipped with advanced technologies for deposition, lithography, 3D printing, etching, inspection, and packaging, the facility enables the fabrication of high-precision micro and nanoscale devices and integrated components. Our cleanroom environment ensures reliability, repeatability, and quality throughout every stage of the fabrication process.

The Fabrication Unit is ideal for the development of sensors, quantum devices, photonic components, and micro-nano-scale systems. We support startups, entrepreneurs, and R&D teams seeking professional infrastructure for prototype development and small-scale production.

From initial process planning to final device fabrication, BINA’s expert team works closely with users to ensure optimal results and accelerated innovation.

 

Accelerate your innovation - partner with us today - gr.biunano@biu.ac.il 

 

 

Clean Rooms Facility

Class 100 & 1000 including:
• Oven & Hot Plates
• Plasma asher
• Workstations
• Spinners
• Wet Bench
• Yellow Rooms

Thin Layer Deposition

• ALD
• E-Beam Evaporation
• Ion Beam Sputtering
• Magnetron Sputtering
• PVD tools
• Thermal Evaporation

Micro & Nano Lithography

• e-Beam Lithography
• High Resolution Laser Lithography
• Mask Aligner
• Maskless Laser Lithography

3D Printing

• High-Speed stereolithography (SLA) 3D printer for prototyping and micro-mechanical components
• NanoScribe

Dry and Wet Etch

• Dry etch (ICP RIE)
• Ion Milling
• Wet Etch

Inspection

• 3D Optical Profiler
• Device Analyzer
• Ellipsometer
• Optical Microscopes
• Reflectometer
• SEM
• Stylus Profiler
• XRF

Packaging

• Prob Station
• Wire Bonder
• Wafer Bonder
• Wafer Dicing