Nanofabrication and Advanced Device Fabrication Services - BINA Institute
BINA’s Fabrication Unit is a state-of-the-art cleanroom facility dedicated to sub-micron and nanoscale device fabrication. The unit provides advanced fabrication services for both academic and industrial users, supporting research, development, and prototyping with expert guidance and cutting-edge infrastructure.
Equipped with advanced technologies for deposition, lithography, 3D printing, etching, inspection, and packaging, the facility enables the fabrication of high-precision micro and nanoscale devices and integrated components. Our cleanroom environment ensures reliability, repeatability, and quality throughout every stage of the fabrication process.
The Fabrication Unit is ideal for the development of sensors, quantum devices, photonic components, and micro-nano-scale systems. We support startups, entrepreneurs, and R&D teams seeking professional infrastructure for prototype development and small-scale production.
From initial process planning to final device fabrication, BINA’s expert team works closely with users to ensure optimal results and accelerated innovation.
Accelerate your innovation - partner with us today - gr.biunano@biu.ac.il
Clean Rooms Facility
Class 100 & 1000 including:
• Oven & Hot Plates
• Plasma asher
• Workstations
• Spinners
• Wet Bench
• Yellow Rooms
Thin Layer Deposition
• ALD
• E-Beam Evaporation
• Ion Beam Sputtering
• Magnetron Sputtering
• PVD tools
• Thermal Evaporation
Micro & Nano Lithography
• e-Beam Lithography
• High Resolution Laser Lithography
• Mask Aligner
• Maskless Laser Lithography
3D Printing
• High-Speed stereolithography (SLA) 3D printer for prototyping and micro-mechanical components
• NanoScribe
Dry and Wet Etch
• Dry etch (ICP RIE)
• Ion Milling
• Wet Etch
Inspection
• 3D Optical Profiler
• Device Analyzer
• Ellipsometer
• Optical Microscopes
• Reflectometer
• SEM
• Stylus Profiler
• XRF
Packaging
• Prob Station
• Wire Bonder
• Wafer Bonder
• Wafer Dicing