Ion channeling analysis

  • Assess crystallinity of MBE-grown thin films such as type of defect structures, impurity location, type of atomic site, lattice strain and alignment in epitaxial growth
  • Enhance surface sensitivity of light elements on heavier single crystal substrate
  • Channeling-RBS, Channeling-NRA, and Channeling-PIXE are available for different applications

Last Updated Date : 14/12/2021