VST Fortuna e-Beam evaporation system
• Substrates up to diameter of 300 mm
• 15 kW EB Gun for fast deposition rate
• High accuracy double crystal QTM
• 6 x 25CC crucibles
• Ion assist deposition
• Ion Beam cleaning
• Substrate rotation and tilting
• Progressive shutter possibility for gradient thickness film deposition
• Robotic arm load lock
Last Updated Date : 06/04/2022
