VST Fortuna e-Beam evaporation system

• Substrates up to diameter of 300 mm
 
• 15 kW EB Gun for fast deposition rate
 
• High accuracy double crystal QTM
 
• 6 x 25CC crucibles
 
• Ion assist deposition
 
• Ion Beam cleaning
 
• Substrate rotation and tilting
 
• Progressive shutter possibility for gradient thickness film deposition
 
• Robotic arm load lock
VST Fortuna e-Beam evaporation system

Last Updated Date : 06/04/2022