Ion Beam Supttering System

Contacts: Dr. Joseph Kantorovitsch, joseph.kantorovitsch@gmail.com

Model:  Intelvac Nano Quest

Manufacture:  Intlvac

Description:

Ion Beam Sputtering System with Ion Assist/Etch for high-end thin lilm deposition processes.

The system intended for deposition of high quality optical and magnetic coatings:

• Maximum substrate size 100 mm

• Ion Beam Sputtering including Ion assist and reactive sputtering options

• Ion beam milling

• Ar, O2, N2 sputter gases

• Ions energy up to 1200 eV

• Load Lock

• Very high films quality and thickness accuracy and repeatability

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