Ion Beam Sputtering System
Contacts: Dr. Joseph Kantorovitsch, joseph.kantorovitsch@gmail.com
Model: Intelvac Nano Quest
Manufacture: Intlvac
Description:
Ion Beam Sputtering System with Ion Assist/Etch for high-end thin lilm deposition processes.
The system intended for deposition of high quality optical and magnetic coatings:
- Maximum substrate size 100 mm
- Ion Beam Sputtering including Ion assist and reactive sputtering options
- Ion beam milling
- Ar, O2, N2 sputter gases
- Ions energy up to 1200 eV
- Load Lock
- Very high films quality and thickness accuracy and repeatability
Last Updated Date : 23/03/2025
