PVD System (Sputtering, Thermal and e-Beam Evaporation)

Contacts: Mr. Moshe Feldberg, moshe.feldberg@biu.ac.il

Model:  Bestec, custom made

Manufacture:  Bestec

Description:

PVD system for thin layer deposition has 2 chambers (Thermal and Sputtering) and load lock (LL). The left chamber contains e-BEAM and thermal evaporation, the sputtering chamber (right one) contains 4 DC magnetrons sources and ion beam milling source. The Load-Lock is located between these 2 chambers to ensure interactive during transfer.

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