IBA - Ion Beam Analysis

Contact: Dr. Girshevitz Olgaolga.girshevitz@biu.ac.il


Model: 1.7 MV tandem Pelletron, model 5SDH

Manufacture: NEC, USA


Ion Beam Analysis (IBA) is a cluster of techniques involving materials analysis by MeV ion beams. When an energetic ion strikes a target there are a variety of energy loss mechanisms, any (or all) of which can be used (together or separately) to obtain information about the target. Energy distribution of backscattering ions quantifies the depth distribution for a given element.  Distinctive characteristic X-rays emitted from the different target elements upon the beam bombardment ensure the accurate identification of similar mass elements.  Gamma rays emitted from the beam-induced nuclear reactions provide an excellent sensitivity (~ppm) and/or depth resolution (~50 Å) for certain light isotopes such as 1H, 15N, and 19F.


  • Rutherford Backscattering Spectroscopy (RBS)
  • Elastic Recoil Detection Analysis (ERDA)
  • Particle Induced X-Ray Emission (PIXE)
  • Nuclear Reaction Analysis (NRA)
  • Ion Channeling

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