Dual Beam (FIB), Helios 5UC

The Helios 5UC is a dual beam instrument combining scanning electron beam (SEM) and Focused Ion Beam (FIB) technologies as well as gas chemistries, different detectors and manipulators. Various applications with nano to micro scale resolution can be performed using the FIB for patterning, milling, cross section, materials deposition, High Resolution SEM imaging, 3D Imaging, EDS, Cryo cut & imaging.

  • E-Beam resolution- 0.6nm
  • Ion-Beam resolution- 2.5nm
  • Detectors- TLD, ICD, MD, ETD, ICE, STEM, EDS
  • Chemical deposition- W, C, SiO
  • Chemical etcher- XeF2
  • Cross section
  • High quality TEM sample preparation
  • 3D imaging
  • Patterning
  • Failure analysis
  • Cryo cut & imaging
Helios 5UC, Thermo-Scientific



Last Updated Date : 21/08/2023