FIB

Contacts: Dr. Sasha Domantovsky,  alexander.domantovsky@biu.ac.il

Model: Helios 5UC DualBeam

Manufacture: Thermo Fisher Scientific, USA

Description:

The Helios 5 UC model integrates Scanning Electron Beam (SEM) and Focused Ion Beam (FIB) technologies to enable multi-scale, multi-dimensional analysis with nano-scale resolution. Equipped with various detectors, GIS systems, and a micromanipulator, it excels in high-resolution imaging, nano-patterning, material deposition, milling, and TEM lamella preparation.

Key features include electron beam deceleration for enhanced low kV performance, access to 20eV landing energies, charge compensation, and balanced topographic and material contrasts. Automated sequential FIB milling, and SEM imaging facilitate the collection of 2D images for subsequent 3D volume reconstructions.

The integrated Oxford EDX detector offers elemental and chemical analysis, providing accurate data at micro- and nanoscales. Additionally, a cryo- stage accommodates beam-sensitive samples, enhancing versatility and applicability across various research domains.

Resolution:

                   Electron beam: 0.6 nm at 15 kV; 1.2 nm at 1 kV

                   Ion beam at coincident point: 4.0 nm at 30 kV

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