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Helios 600, FEI

The Helios 600 is a dual beam instrument combining scanning electron beam (SEM) and Focused Ion Beam (FIB) techchnologies as well as gas chemistries, different detectors and manipulators. Various applications with nano to micro scale resolution can be performed using the FIB for paternning, milling, cross section, materials deposition, High Resolution SEM imaging, SEM imaging, EDAX and even micro probing.

  • Dual beam FIB
  • Micro probing
  • Cross section
  • TEM sample preparation
  • Patterning
  • Failure analysis

תאריך עדכון אחרון : 15/10/2018