Stylus Profiler
Specifications:
- Scan length: from 50 µm to 50 mm
- 2.5 μm tip radius
- 0.03-15 mg variable stylus force
- Minimum step height: 5 nm
- Maximum step height: 1 mm
- Vertical repeatability = 4Å on 0.1 um step
- Max sample thickness: 50 mm / max sample diameter: 8"
