Stylus Profiler

Specifications:

  • Scan length: from 50 µm to 50 mm

  • 2.5 μm tip radius
  • 0.03-15 mg variable stylus force
  • Minimum step height: 5 nm
  • Maximum step height: 1 mm
  • Vertical repeatability = 4Å on 0.1 um step
  • Max sample thickness: 50 mm / max sample diameter: 8"

 

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