Stylus Profiler
Specifications:
Scan length: from 50 µm to 50 mm
2.5 μm tip radius
0.03-15 mg variable stylus force
Minimum step height: 5 nm
Maximum step height: 1 mm
Vertical repeatability = 4Å on 0.1 um step
Max sample thickness: 50 mm / max sample diameter: 8"
