Fabrication Facility
Specifications:
- Clean Rooms
- Class 100 Yellow room for lithography
- Class 1000 White rooms for etch and deposition
- Working stations
- Wet Bench for cleaning, spinning, developing and etch
- Chemical hoods
- Spinners, Oven & Hot Plates
- Cleaning and Activation
- Ultra sonic tanks (freq + puls)
- Plasma chamber for cleaner and activation with 3 gases (O2, Ar, N2)
- UV cleaner + ozone generator
