Fabrication Facility

Specifications:

• Clean Rooms
  • Class 100 Yellow room for photolithography
  • Class 1000 White rooms for etch and deposition
• Working stations

           Clean room workstations for sample cleaning, spin coating, photo / electron beam resist                                 development and wet etch include spinners, oven & hot Plates

• Cleaning and Activation
  • Ultra sonic tanks (freq + puls)
  • Plasma asher for cleaning and activation with 3 gases (O₂, Ar, N₂)
  • UV cleaner + ozone generator

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