Process Engineer

Mr. Mark Oksman

Bld 206, Rm B34

    He has over 40 years of experience in Micro/Nano Fabrication and experimental physics with an extensive expertise in microfabrication processes and equipment (Photolithography, PVD, PE CVD, RIE, DRIE, RTP, NIL, all kinds of sputtering, wet etching and cleaning, dicing). His professional skills include Clean Rooms; Vacuum systems; Vacuum processing; MEMS & MOEMS; Microoptics; Scientific measurements. Mark is responsible for Microfabrication processes development and implementation, Photolithography masks fabrication,  Users training and support; Users consulting for process and devices development; and Fabrication Equipment Operation.

    Last Updated Date : 09/05/2024