HR-SEM
Specifications:
- Field Emission Gun (Schottky field emitter)
- High vacuum
- Oxford EDS detector
- 500eV-30kV energy range
- Everhart-Thornley detector (ETD)
- Through-the-lens detector (TLD) for Ultra high resolution
- Electron Backscatter Diffraction (EBSD)
- Scanning tunneling (STEM) detector