FIB
Specifications:
- Electron beam current range: 1.6 pA to 100 nA
- Accelerating voltage range:350 V – 30 kV
- Ion beam current range: 1 pA – 100 nA
- Accelerating voltage range: 500 V – 30 kV
Analytical and imaging detectors:
- Secondary electrons detectors
- Secondary ions detector
- Backscattered electrons detectors
- Electron detector for STEM
- X-ray detector for energy-dispersive X-ray spectroscopy
