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Institute of Nanotechnology & Advanced Materials Bar-Ilan University
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Fabrication and Characterization Menu
  • Characterization Unit, MIXA
    • AFM
      • Icon
      • MultiMode V
      • Bio FastScan
    • Biological samples preparation
      • Cp3 cryoplunge3
      • LEICA EM ACE
      • Freeze
      • High Pressure Freezing
      • Leica EM Cryo CLEM
      • Ultra Microtome
    • Contact Angle
    • Diffraction by X-Ray
    • Advanced Electron Microscopy Analysis
      • FIB
      • HR-SEM Magellan
      • HR-SEM Sigma
      • HR-TEM JemF200
      • SEM
    • IBA
      • ERDA
      • Ion channeling analysis
      • NRA
      • PIXE
      • RBS
      • Ion Implanter
    • RAMAN
    • What’s new- Coming Soon
  • Fabrication Unit
    • Facility
      • Clean-Room
    • Deposition
      • e-beam Evaporation System
      • Ion beam Sputtering System
      • PVD System
    • Lithography
      • High Resolution Laser Lithography
      • E-beam Lithography
      • Mask Aligner
      • Maskless Laser Lithography
    • 3D Printing
      • 3D Bioprinter, BIO X6 Cellink
      • Nano Scribe
    • Etching
      • ICP/RIE
    • Inspection
      • LEXT 3D optical profiler
      • Spectroscopic Reflectometer
      • Stylus Profiler
      • Spectroscopic Ellipsometer
      • XRF
    • Packaging
      • Dicing Saw
      • Wafer Bonder
    • What's new - Coming Soon
  • Industrial Projects

Dry Etch ICP-RIE

עברית

Contacts: Mr. Mark Oksman, mark.oksman@biu.ac.il

 

Model:  Versaline SLR 770 ICP RIE

Manufacture:  Plasmatherm

Description:

Dry Etch ICP-RIE produces high density plasma with the ability to control both ion flux and ion energy independently. Our system includes with 12 gas lines for Fluorine and Chlorine process and large library of processes for electronic, photonic, MEMS, and nanotechnology applications.

 

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Reactive Ion etcher

Last Updated Date : 25/03/2025

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