Clean Rooms Facility

Clean rooms

Class 100 Yellow room for lithography
Class 1000 White rooms for etch and deposition

Working stations

Wet Bench for cleaning and etch.
Spinners, Oven & Hot Plates

Cleaning and Activation

Ultra sonic tanks (freq + puls)
Plasma chamber for cleaner and activation with 3 gases (O2, Ar, N2).
UV cleaner + ozone generator
Clean Rooms Facility

Last Updated Date : 06/04/2022