Superresolved Imaging of Microelectronic Devices for Improved Failure Analysis

In this paper, we present a new numerical approach for improving the resolving power of low-resolution (LR) images. This approach may be applied for failure analysis of microelectronic chips. The resolution improvement is based upon numerical iterative comparison between a LR experimentally captured image and a high-resolution layout image of the same region of interest.

Last Updated Date : 14/01/2015