3D Optical Profiler (Laser Scanning Confocal Microscope)

Contacts: Mr. Mark Oksman, mark.oksman@biu.ac.il

Model:  Olympus LEXT OLS4100

Manufacture:  Olympus

Description:

Confocal laser scanning microscope allows observations of three-dimensional shapes, such as high-density semiconductors and micro-fabricated MEMS. The LEXT microscope uses a laser scanning head for both direct imaging of the surface and for surface profile measurements and makes possible to get high resolution 3D images as well as surface metrology.

Types of the measurements:

• Roughness
• Geometric measurements
• Area/volume
• Step
• Profile
• Size of the particles
• Film thickness

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