Clean Rooms Facility
Clean rooms
•Class 100 Yellow room for lithography
•Class 1000 White rooms for etch and deposition
Working stations
•Wet Bench for cleaning and etch.
•Spinners, Oven & Hot Plates
Cleaning and Activation
•Ultra sonic tanks (freq + puls)
•Plasma chamber for cleaner and activation with 3 gases (O2, Ar, N2).
•UV cleaner + ozone generator
Last Updated Date : 30/06/2022
