Clean-room
Contacts: Mr. Moshe Feldberg, moshe.feldberg@biu.ac.il
Description:
A 152-meter square cleanroom of class 100 and class 1000 equipped with a full suite of tools supporting device fabrication and characterization.
Specifications:
- Clean Rooms
- Class 100 Yellow room for photolithography
- Class 1000 White rooms for etch and deposition
- Working stations
Clean room workstations for sample cleaning, spin coating, photo / electron beam resist development and wet etch include spinners, oven & hot Plates
- Cleaning and Activation
- Ultra sonic tanks (freq + puls)
- Plasma asher for cleaning and activation with 3 gases (O2, Ar, N2)
- UV cleaner + ozone generator

Last Updated Date : 30/06/2025