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Nano Fabrication

Nano Fabrication

scientific state of the art nano-manufacturing environment by providing both mentorship and access to interdisciplinary research teams from both academia and industry.

Bina Facility provides state-of-the-art environment and tools for micro and nano fabrication.

Infrastructure: Class 100 and Class 1000 clean rooms.

Lithography: 50Kev E-Beam, Mask Aligner, and Direct Laser.

Deposition: Ion Beam Sputtering, Magnetron-Sputtering, Thermal / E-Beam Evaporation, and Atomic Layer Deposition (ALD).

Etch and Milling: ICP-RIE (Reactive Ion Etch), Ion Milling.

Packaging: Wafer Bonder and Wafer Dicing

Process inspection: Optical and Stylus profilers, XRF, Ellipsometers, Microscopes, Probe-Station with Device Analyzer.

In addition to operating the equipment, our professional staff provides ongoing support for a broad range of fabrication processes, and offers creative solutions and suggestions where needed.

Spectroscopic Imaging Ellipsometer

Last Updated Date : 05/08/2021