Environmental Scanning Electron Microscope

Environmental Scanning Electron Microscope, Ouanta FEG 250, FEI is using for morphology and topography analysis at resolutions down to 1.2nm. The uniuqeness  of the E-SEM is the ability to perform the measurement under humid and LV conditions in adition to the standart HV conditions. The use of Field Emission Gun (FEG) is significantly improved signal to noise ratio and spatial resolution and therefore enable to obtain a better latteral resolution.

Specifications: 
  • Field Emission Gun (Schottky field emitter)
  • High/low vacuum
  • High vacuum with beam deceleration
  • Extended vacuum mode (wet-ESEM)
  • High and low temperature imaging in the range of -20°C - +1000°C
  • Detectors: SE, BSED, vCD, EDS, STEM
  • Resolution 1.2nm
ESEM